Product Presentations

Product Presentations in Power Point Format

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	Product	Date	Size	Description
TEA Systems Product - Introduction Overview	All	Dec. 2005	5.4 Mb	All Products: introduction with comments on Note Pages - ppt
TEA Product Presentation - Alternate	All	Dec. 2004	5.7 Mb	Products presentations with additional screens and shots
ASML Overlay data file - analysis	Vector Raptor	May 2007	5.4 Mb	Vector Raptor import of ASML Immersion data file in native format. Analysis of data.
Overlay Immersion analysis of over 15,000 data points	Vector Raptor	June 2007	1.3 Mb	Outlier removal, data import, wafer model, fine-residual study.
Vector Raptor Overlay - Product Overview	Vector Raptor	July 2007	4.9 Mb	Overview of base features of Vector Raptor overlay and registration analysis tools for overlay setup, characterization and double exposure/patterning studies
Tutorial: Saving results as data	Vector Raptor	Aug. 2007	300k	Saving analysis residuals of modeled data terms into a worksheet that can later be loaded as a data file.
Analysis of wafer-chuck influence on features	Weir PW	Nov. 2003	870kb	Wafer E-Chuck thermal cooling can be seen on BCD variation using Weir PW
Weir PW Overview	Weir PW	Dec. 2004	3.0 Mb	Overview of Weir PW product and some Weir DM
Process Window Analysis	Weir PW	Sept. 2003	1.7 Mb	Screens used in process windows calculations
Full-field feature profile models in process control	Weir PW	March 2005	7 Mb	Process window calcuations for sub-90 nm processes SPIE 5755_16 (2005)
Weir PSFM Overview	Weir PSFM	Jan 2004	3 Mb	Overview of the utilities for measuring and analyzing Focus Perturbations
Weir Fixed Focus Analysis	Weir PSFM	Sept. 2003	2.2 Mb	Focus variations across a wafer and the influence of the scan-slit
Wafer Edge Focus Effects	Weir PSFM	Oct 2003	466 kb	Focus perturbations caused by the auto-leveling of the scanner and edge bead
Weir PSFM Flow	Weir PSFM	Dec. 2003	85 kb	Analysis flow between calibration and fixed focus analysis - Flow Chart
CANON Zspin Focus Analysis I	Weir PSFM	March 2005	759 kb	CANON focus pattern analysis of fixed focus and it's calibrations
CANON Zspin Focus Analysis II	Weir PSFM	March 2005	1.6 Mb	Another CANON focus pattern analysis of fixed focus
On-Wafer analysis of two plates	LithoWorks PEB	Aug. 2003	1.4 Mb	Demonstration of two different hot plate performance. Duplicates and extends OnWafer capabilities
PEB and CD analysis of two plates	LithoWorks PEB	Aug. 2003	1.7 Mb	Extending hot-plate analysis to CD and feature profile variations.
PEB Plate repeatability	LithoWorks PEB	Aug. 2003	1.6 Mb	Hot plat repeatability over multiple runs
Weir DMA Getting Started	Weir DMA	Oct. 2005	470kb	How to setup and run Weir DM in the program-callable, automated mode.
Weir DMA setup	Weir DMA	Dec. 2005	1.1 Mb	Setup of the Weir DM and Weir DMA Macro

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