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Overview of Data Loading and storage

Loading raw data into the Weir Standard Workbook

Loading the data into Vector Raptor

Initial tools for data selection and culling

Easy graphics based on Wafer & Field Location

Part 1 of 3 Overview of field and wafer raw data analysis

Analyses that can be performed while in the Data Selection tab

Tool, process and metrology precision

Metrology variable Covariance calculations & plots

Wafer & Field Model Selection

Full-Field model analysis with contour plots

Part 2 of 3 Overview of model selections

Average field modeling, residual contours

Setting vector scale and size

Removal of slit or scan signature, center field site value etc.

Wafer/Process model for data

Part 3 of 3 Overview of Enhanced Data Culling & Utilities

Mouse and point selected data culling & restoration

Population Range and Standard Error Distributions

Culling by Wafer Radius & Radial Distribution