Summary

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Data Formats are imported and converted. Data, reports and sub-analyses are stored in Microsoft Excel Workbooks using:

TEA Standard Data Format

Never a charge for new import formats!

TEA Products import all formats including KLA-Tencore, Accent, Bio-Rad, Hitachi, IVS, Soluris, Schlumberger, Nanometrics, CDE ResMap, Ellispometer, NIKON, CANON, ASML, ThermoWave, NOVA, TEA, TEL, Timbre, TEL, Sensarray, OnWafer, Excel and others. Overlay, Registration, Feature Profiles, CD, Film Thickness, Temperature, Electrical Test, Faraday, Kelvin Structures etc.

TEA products Overview

TEA Products Features

TEA Products Applications

Product License & System Requirements

Wafer and Field Models

Data Culling

Vector Raptor Overview

Vector Raptor - Why a new Overlay Modeling Tool is Needed?

Basic Features

Basic Weir PW Features

Weir PW Overview

Weir PW product in-depth overview.

Process Window

Overview of Process Window functionality for extended process setup and lens/reticle qualification. Includes:

• step-by-step from multi-variable data loading,

• FEM layout,

• spreadsheet organization,

• data culling,

• variable covariance etc.

• Also includes focus uniformity,

• reticle CD evaluation,

• optimized "CD vs Dose",

• DoF uniformity and

• process window variable evaluation.

ARC influence on CD's

Analysis of Spatial Distributions

Advanced Litho Tool Study

Study of process reactions to films and depth-of-focus