Download File: Getting Started with TEA Systems' Products

TEA Systems’ products deliver vendor independent analysis capabilities that are unmatched in the industry. From the broad spectrum of data gathering, through raw data statistical and spatial analysis and into advanced, adaptive models that provide unique insights into the tool performance, the subsystem error contributions and process influence. Data is stored in an open format providing full user access to raw, modeled and derived matrices.

All TEA System's analyses are highly automated and tuned to the specific needs of semiconductor manufacturing. Object-oriented lot and process models provide interactive graphics with full drill-down capabilities for visualization and area specific data extraction. All products offer enhanced data culling when handling either noisy data or localized disturbances in the process. Culling is both automated and open to user manual control. Data culling can be performed through analysis specific controls and mouse-selected, point-and-click removal or area, wafer, field, site and point specific members.

Proprietary mathematical, graphic and modeling engines are uniquely tuned to the highly systematic data populations found in semiconductor manufacturing. Regressions use TEA System's proprietary Singular Value Decomposition, adaptive modeling to provide un-matched accuracy in deriving the control and tuning components that you need to control your process and yields.