Side-Wall-Angle (SWA) and Photoresist uniformity plotted as 1-D Vector plots using Weir PW and Weir DM
Full-Field Isofocal Response and Aberration tolerance for RET
Use Weir PW to derive swing-curves even from production data
Modled Silicide and Trench depth uniformity by Weir PW
Dose Response for several Periodic Structures of 120, 210 and 275 nm AFTER focus errors have been removed by Weir PW.
The lower curves of the plot show the calculated optimum focus for each structure as a function of dose.
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