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		Features	Brochure		Applications		Software Requirement Specification
		pdf	html	pdf	html	pdf	pdf
Vector Raptor	Overlay & Registration setup and control		VR	889 K	Product (ppt) FOCAL (ppt)		245K
VR_Matching	Matching & Difference Analysis Tools for all metrology		VRmatch	579k	Single Wafer FOCAL, Focus & Pre-Align Stage BARC process window evaluation
Weir PW	Full-Profile process control & response surface analysis	710K	PW	774K	Reticle Haze (ppt) Haze Aberration Analysis (ppt)		297K
Weir PSFM	Focus calibration and perturbation decoupling	710K	PSFM	495K			135K
Weir DMA	Automated Script Analysis Software		DMA	400K
Weir DM	Interactive Daily Monitor	710K	DM	526K
Weir TR	Temporal Response analysis software for metrology & Thermal Sensor Data	710K	WeirTR	542K	Product Interface (ppt) Temporal systems matching (ppt) OnWafer PEB Sample Analysis (ppt) Thermal SensArray Sample Analysis (ppt)		292K

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