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Vector RaptorOverlay & Registration setup and control VR889K

Product (ppt)

FOCAL (ppt)

 245K

VR_Matching

Matching & Difference Analysis Tools for all metrology VRmatch579kSingle Wafer

FOCAL, Focus & Pre-Align Stage

BARC process window evaluation

  
Weir PWFull-Profile process control & response surface analysis710KPW774K

Reticle Haze (ppt)

Haze Aberration Analysis (ppt)

 297K
Weir PSFMFocus calibration and perturbation decoupling710KPSFM495K  135K
Weir DMAAutomated Script Analysis Software DMA400K   
Weir DMInteractive Daily Monitor710KDM526K   
Weir TRTemporal Response analysis software for metrology & Thermal Sensor Data710KWeirTR542K

Product Interface (ppt)

Temporal systems matching (ppt)

OnWafer PEB Sample Analysis (ppt)

Thermal SensArray Sample Analysis (ppt)

 292K
 
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