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Weir DM setup & operation
Setup & Organization Weir DM setup is explained on a step by step bases. Examples using the DM are then presented
Extended lot analysis Weir DM analysis is applied to a single lot of wafers rather than periodic sampling. Analysis of the wafers, in the order they were exposed, show evidence of lens heating as seen on aberrations such as Astigmatism and field uniformity
Weir DMA Getting Started How to setup and run Weir DM in the program-callable, automated mode.
Weir DMA setup Setup of the Weir DM and Weir DMA Macro

 

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